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Communication Dans Un Congrès Année : 2019

Ellipsometric modelling as a solution to the optimization of thin films devices fabrication process

Mihaela Girtan
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hal-02444500 , version 1 (17-01-2020)

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  • HAL Id : hal-02444500 , version 1

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Mihaela Girtan. Ellipsometric modelling as a solution to the optimization of thin films devices fabrication process. ModTech, Jun 2019, Iasi, Romania. ⟨hal-02444500⟩

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