Combined x-ray reflectivity and grazing incidence x-ray fluorescence analysis of a Ta/Cr/Pt trilayer stack
Résumé
Measurements of X-ray reflectivity (XRR) and Grazing incidence x-ray fluorescence (GIXRF) were performed at the Métrologie beamline of SOLEIL synchrotron with the CASTOR setup with 6.25 keV incident photons.